Surface treatment method

Details Surface treatment method Surface treatment method

1990-04-16

1992-04-28

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 35, 427 531, 427 541, 156643, 156646, 156662, 156664, B05D 306, B44C 122

Patent

active

051087782

ABSTRACT:
Disclosed are a surface treatment method and apparatus in which an active species beam that contains active species having translational energy in a range of 0.01-100 eV as at least a partial constituent thereof constructs at least a part of treatment means.

REFERENCES:
patent: 4522674 (1985-06-01), Ninomiya et al.
Rettner et al., "Dissociative Chemisorption of CH.sub.4 on W(110); Dramatic Activation by Initial Kinetic Energy", Phys. Rev. Lett. 54(25) Jun. 1985 pp. 2716-2719.
Shapiro, "The Dynamics and Thermodynamics of Compressible Fluid Flow", Ronald Press Company, N.Y., 1953 pp. 71-111.

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