Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-01-27
1989-12-12
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118724, 156643, 156345, 427 38, B44C 122, H01L 21306, C23C 1400, B05D 306
Patent
active
048865710
ABSTRACT:
An apparatus for surface treating a sample article with activated particles, comprising a reaction chamber in which a sample article to be surface processed is placed, means for introducing a reaction gas into the reaction chamber, an activation surface properly set in the reaction chamber and arranged capable of activating at least one part of the particles composing the reaction gas, and means for evacuating the used reaction gas out of the reaction chamber.
REFERENCES:
patent: 4522674 (1985-06-01), Ninomiya et al.
Hiraoka Susumu
Nishimatsu Shigeru
Suzuki Keizo
Hitachi , Ltd.
Powell William A.
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