Surface treating apparatus and method using vapor

Details Surface treating apparatus and method using vapor Surface treating apparatus and method using vapor

1990-04-20

1992-12-29

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156345, 134 31, 1341021, B05D 100

Patent

active

051748550

ABSTRACT:
A surface treating apparatus using vapor includes a container for holding two liquids, e.g., hydrogen fluoride and water, which exhibits an azeotropic phenomenon under predetermined conditions, and an azeotropic condition establishing device for conditioning the container to satisfy the predetermined azeotropic conditions. Under the azeotropic conditions, a vapor mixture having the composition of the liquid mixture is produced, and surface treatment of substrates or the like is performend using the vapor mixture. Since the vapor of the liquid mixture in the azeotropic state is used for surface treatment of substrate, surface treatment is effected under fixed conditions all the time.

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patent: 4795497 (1989-01-01), McConnell et al.
patent: 4902351 (1990-02-01), Kunze et al.

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