Surface texture measuring instrument

Details Surface texture measuring instrument Surface texture measuring instrument

2008-01-15

2008-01-15

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Surface roughness

C356S496000, C356S511000, C356S514000, C356S489000, C356S501000, C250S234000, C250S306000, C250S376000, C250S201300

Reexamination Certificate

active

11263742

ABSTRACT:
A surface texture measuring instrument provided with a near-field measuring unit (30) including a near-field probe (33) that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source (35) that generates the laser beam to be irradiated on the near-field probe (33), a detection element (38) that detects scattering effect of the near-field light generated when the near-field probe (33) is moved close to a workpiece (1), and an actuator (32) that displaces the near-field probe (33) and the workpiece (1) in a direction moving close to/away from each other, includes: a laser length-measuring unit (20) that measures a relative distance between a reference position and the workpiece (1) in the vicinity of the tip end of the near-field probe (33) or a relative distance between the reference position and the near-field probe (33).

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Vaez-Iravani M et al: “Polarization, Interference Contrast, and Photoluminescence Imaging in Near Field Optical Microscopy”, Materials Research Society Symposium Proceedings, Materials Research Society, Pittsburgh, PA, US,, vol. 332, Nov. 29, 1993, pp. 437-447.

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