Surface state detecting apparatus

Details Surface state detecting apparatus Surface state detecting apparatus

2011-08-02

2011-08-02

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07990535

ABSTRACT:
A surface inspection apparatus includes units illuminating repetitive patterns formed on a surface of a suspected substance and measuring a variation in an intensity of regular reflection light caused by a change in shapes of the repetitive patterns, units illuminating the repetitive patterns with linearly polarized light, setting an angle formed between a repetitive direction of the repetitive patterns and a direction of a plane of vibration of the linearly polarized light at a tilt angle, and measuring a variation in a polarized state of the regular reflection light caused by the change in the shapes of the repetitive patterns, and a unit detecting a defect of the repetitive patterns based on the variation in the intensity and the variation in the polarized state of the regular reflection light.

REFERENCES:
patent: 5835220 (1998-11-01), Kazama et al.
patent: 6452671 (2002-09-01), Uda et al.
patent: 6690469 (2004-02-01), Shibata et al.
patent: 2004/0063232 (2004-04-01), Komatsu et al.
patent: 2005/0084782 (2005-04-01), Sentoku
patent: 2006/0192953 (2006-08-01), Fukazawa et al.
patent: 2006/0232769 (2006-10-01), Sugihara et al.
patent: U-05-030761 (1993-04-01), None
patent: A-2001-141657 (2001-05-01), None
patent: A-2002-116011 (2002-04-01), None
patent: A-2006-105951 (2006-04-01), None
patent: WO 2005/040776 (2005-05-01), None
Aug. 7, 2007 International Search Report for PCT/JP2007/000496.

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