Surface position detection apparatus

Details Surface position detection apparatus Surface position detection apparatus

1996-05-06

1997-05-27

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

056337213

ABSTRACT:
A surface position detection apparatus for detecting a surface position on a surface to be detected, comprises a projection pattern formed on a first surface, a projection optical system for projecting the pattern from an oblique direction onto the surface to be detected, a condensing optical system for condensing a light beam reflected by the surface to be detected, and forming an image of the pattern on a second surface, and a detector for photoelectrically detecting the image of the pattern. The first surface and the surface to be detected are arranged to satisfy a Scheimpflug condition in association with a principal plane of the projection optical system. The surface to be detected and the second surface are arranged to satisfy a Scheimpflug condition in association with a principal plane of the condensing optical system.

REFERENCES:
patent: 4687322 (1987-08-01), Tanimoto et al.
patent: 5076698 (1991-12-01), Smith et al.
patent: 5118957 (1992-06-01), Kawashima et al.
patent: 5218415 (1993-06-01), Kawashima et al.
patent: 5272501 (1993-12-01), Nishi et al.

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