Surface position detecting system and device manufacturing metho

Details Surface position detecting system and device manufacturing metho Surface position detecting system and device manufacturing metho

1998-05-01

2000-03-21

Hantis, K. P.

Optics: measuring and testing

By polarized light examination

With light attenuation

250548, 2505593, 356401, G01B 1114

Patent

active

060409096

ABSTRACT:
A detecting system for detecting positional information related to a surface of an object. The detecting system includes a variable pattern generator for projecting an arbitrary pattern image on the surface of the object, a light projecting optical system for projecting a pattern, defined by the variable pattern generator, to the surface of the object along an oblique direction, a light receiving optical system for directing light from an image of the pattern and a light receiving element for detecting the light directed by the light receiving optical system. Surface position information about the surface of the object is detected on the basis of the detection by the light receiving element.

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