Surface measuring method and apparatus

Details Surface measuring method and apparatus Surface measuring method and apparatus

1990-06-07

1992-05-19

Anderson, Bruce C.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

2505051, H05H 300

Patent

active

051151308

ABSTRACT:
A surface measuring method and apparatus utilizes a low energy neutral particle (neutral atom, neutral molecule) controlled to be equal to or lower than 1 eV, which is caused to collide against the surface of a specimen. A neutral particle reflected at the specimen surface is detected, and its energy is measured to non-destructively measure the chemical bonding state of the specimen surface.

REFERENCES:
patent: 4629899 (1986-12-01), Plies
patent: 4775789 (1988-10-01), Albridge et al.
patent: 4886964 (1989-12-01), Pritchard et al.
patent: 4992656 (1991-02-01), Clauser
"Atomic beam spectrometer for Surface Investigation"Scherb et al., Rev Sci. Inst., vol. 47, No. 12, Dec. 1976, pp. 1511-1515, 250-251.
"Structure and Dynamics of Surfaces I", W. Schommers et al, pp. 56-65, 245-277, 1986.

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