4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Takashi Yunogami

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Apparatus for and method of surface treatment for microelectroni

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Manufacturing method of semiconductor integrated circuit device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for fabricating semiconductor integrated circuit device

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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Method of manufacture of semiconductor integrated circuit

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-915204

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