Surface inspection method and surface inspection system

Details Surface inspection method and surface inspection system Surface inspection method and surface inspection system

2006-06-20

2006-06-20

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S369000

Reexamination Certificate

active

07064820

ABSTRACT:
A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are coated by changing a photodetection polarizing angle by the photodetection polarizing angle changing means, and the step of performing surface inspection by setting the photodetection polarizing angle to a condition where an S/N ratio of photodetection output is at the highest.

REFERENCES:
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patent: 4614427 (1986-09-01), Koizumi et al.
patent: 5179422 (1993-01-01), Peterson
patent: 6628381 (2003-09-01), Komem et al.
patent: 6797975 (2004-09-01), Nishiyama et al.
patent: 2001-208697 (2001-08-01), None

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