Surface inspection apparatus, polarization illuminating...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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C356S364000, C359S437000

Reexamination Certificate

active

11150385

ABSTRACT:
A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.

REFERENCES:
patent: 4864123 (1989-09-01), Mizutani et al.
patent: 6512579 (2003-01-01), Oomori et al.
patent: 6646735 (2003-11-01), Fukazawa et al.
patent: 6784991 (2004-08-01), Rotter et al.
patent: 6831743 (2004-12-01), Aspnes et al.
patent: 2003/0035350 (2003-02-01), Ogasawara et al.
patent: 10-232122 (1998-09-01), None

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