Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-12-11
2007-12-11
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S364000, C359S437000
Reexamination Certificate
active
11150385
ABSTRACT:
A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.
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Chiaki Kenzo
Hirose Hideo
Nakajima Yasuharu
Oomori Takeo
Satou Tatsumi
Nikon Corporation
Oliff & Beridge PLC
Toatley , Jr. Gregory J.
Underwood Jarreas
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