Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2005-05-17
2005-05-17
Glick, Edward J. (Department: 2882)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S297000, C356S237300
Reexamination Certificate
active
06894302
ABSTRACT:
The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process. In the invention, the scratch and foreign object that occur on the polished or ground surface of the sample is epi-illuminated and slant-illuminated by use of approximately same light flux, the difference between the scattered light intensity emitted from the shallow scratch and that from the foreign object when epi-illumination is applied and slant illumination is applied to thereby discriminate between the shallow scratch and the foreign object, and the directionality of the scattered light when the epi-illumination is applied and the slant illumination is applied is detected to thereby discriminate between the linear scratch and the foreign object.
REFERENCES:
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 4889998 (1989-12-01), Hayano et al.
patent: 5712701 (1998-01-01), Clementi et al.
patent: 5903342 (1999-05-01), Yatsugake et al.
patent: 20020036771 (2002-03-01), Sato et al.
patent: 20020041374 (2002-04-01), Ohshima et al.
Ishimaru Ichiro
Kenbou Yukio
Moriyama Ichiro
Noguchi Minori
Tanabe Yoshikazu
Antonelli Terry Stout & Kraus LLP
Glick Edward J.
Hitachi , Ltd.
Hitachi High-Tech Electronics Engineering Co., Ltd.
Song Hoon
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