Surface inspecting device using bisected multi-mode laser beam a

Details Surface inspecting device using bisected multi-mode laser beam a Surface inspecting device using bisected multi-mode laser beam a

1996-01-25

1996-12-03

Gonzalez, Frank

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

359618, G01N 2100, G02B 2710

Patent

active

055813488

ABSTRACT:
A surface state inspecting device includes an illumination system for illuminating a surface to be inspected, with a beam having non-uniform sectional intensity distribution, a uniforming system for substantially uniforming the sectional intensity distribution of the beam, and an inspecting portion for detecting scattered light from the surface to determine the state of the surface.

REFERENCES:
patent: 5017798 (1991-05-01), Murakami et al.
patent: 5048926 (1991-09-01), Tanimoto
patent: 5105092 (1992-04-01), Natsubori et al.
patent: 5162867 (1992-11-01), Kohno
patent: 5359407 (1994-10-01), Suzuki et al.
patent: 5381225 (1995-01-01), Kohno

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