Optics: measuring and testing – Surface roughness
Reexamination Certificate
2007-01-16
2009-12-08
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Surface roughness
C356S237200
Reexamination Certificate
active
07630086
ABSTRACT:
A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.
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Do Tri
Meeks Steven W.
Oak Dave S.
Soetarman Ronny
Velidandla Vamsi
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
Slomski Rebecca C
Toatley Jr. Gregory J
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