Surface fabricating device

Details Surface fabricating device Surface fabricating device

1991-02-20

1992-05-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118730, 118 501, 118620, 156646, 156656, 156657, 1566591, 156662, 156345, 20419237, 20429836, 427 38, H01L 21306, B44C 122, C23F 102

Patent

active

051104075

ABSTRACT:
Anisotropic etching can be obtained in the direction of the incident heated beam of reactive gas with the introduction of a second material for controlling reactivity.

REFERENCES:
patent: 4734152 (1988-03-01), Geis et al.
patent: 4874459 (1989-10-01), Coldren et al.
patent: 4874460 (1989-10-01), Nakagawa et al.

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