Measuring and testing – Fluid pressure gauge – Vibration type
Reexamination Certificate
2011-08-30
2011-08-30
Allen, Andre J (Department: 2855)
Measuring and testing
Fluid pressure gauge
Vibration type
Reexamination Certificate
active
08006563
ABSTRACT:
A sensor chip has a substrate and a comb-teeth electrode arranged on the substrate. The sensor chip is fixed to a diaphragm structure to be distorted by receiving pressure, and is fixed to the diaphragm structure only through a predetermined fix area so as to detect the pressure. The fix area is defined on only a part of the sensor chip opposing to the diaphragm structure. The sensor chip is restrained by the diaphragm structure in a direction of transmitting surface acoustic wave. Flexibility of the sensor chip in a perpendicular direction approximately perpendicular to the wave transmitting direction is larger than that in the transmitting direction.
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Teshigahara Akihiko
Yamada Hideaki
Allen Andre J
Denso Corporation
Posz Law Group , PLC
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