Surface acoustic wave devices and their manufacturing method

Details Surface acoustic wave devices and their manufacturing method Surface acoustic wave devices and their manufacturing method

1998-05-29

1999-12-07

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310357, H03H 964

Patent

active

059989076

ABSTRACT:
A surface acoustic wave device has a main substrate; a comb-like electrode formed on one of the main surfaces of said main substrate; and a supplementary substrate joined with the other main surface of said main substrate, wherein said supplementary substrate has a smaller thermal expansion coefficient and a larger thickness than said main substrate.

REFERENCES:
patent: 3943389 (1976-03-01), Hickernell et al.
patent: 4562371 (1985-12-01), Asai et al.
patent: 5440189 (1995-08-01), Nakahata et al.
patent: 5446330 (1995-08-01), Eda et al.
patent: 5698471 (1997-12-01), Namba et al.
patent: 5747857 (1998-05-01), Eda et al.
patent: 5771555 (1998-06-01), Eda et al.
patent: 5852702 (1998-12-01), Nishida et al.
"Temperature-Compensation Surface Acoustic-Wave Devices with SiO.sub.2 Film Overlays," by T. E. Parker, et al., J. Appl. Phys., vol. 50, pp. 1360-1369, American Institute of Physics, 1979.
"SAW Properties of SiO.sub.2 /128.degree. Y-X LiNbO.sub.3 Structure Fabricated by Magnetron Sputtering Technique," by Kazuhiko Yamanouchi, et al., pp. 51-57, IEEE Transactions on Sonics and Ultrasonics, vol. SU-31, No. 1, Jan. 1984.
"Effect of a Ferroelectric Inversion Layer on the Temperature Characteristics of SH-Type Surface Acoustic Waves on 36.degree. Y-X LiTaO.sub.3 Substrates," by Kiyoshi Nakamura, et al., IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Control, vol. 41, pp. 872-875, Nov. 1994.

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