Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-01-15
2008-01-15
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
07319284
ABSTRACT:
A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefor is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrate, a silicon layer with a first portion on the insulating layer and a second portion suspended above the indentation, a piezoelectric layer on the first and the second portions of the silicon layer, and at least an electrode on the piezoelectric layer.
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Chen Jyh-Shin
Chen Sheng-Wen
Hu Yi-Chiuen
Kao Hui-Ling
Kung Yu-Sheng
Precision Instrument Development Center National Applied Researc
Rosenau Derek
Schuberg Darren
Volpe and Koenig P.C.
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