Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2005-04-12

2005-04-12

Tan, Vibol (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S195000, C310S31300R, C310S31300R

Reexamination Certificate

active

06879225

ABSTRACT:
A surface acoustic wave device includes a Y-cut, X-propagation LiTaO3substrate, at least one interdigital transducer provided on the LiTaO3substrate and made of Al or a metal containing Al as a major component, and an SiO2film provided on the surface of the LiTaO3substrate so as to cover the interdigital transducer, wherein the thickness Hs of the SiO2film normalized by the wavelength λ of a surface acoustic wave and the cut angle θ of the LiTaO3substrate are set to be in any one of the ranges represented by formulae (1) to (8):in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.00<Hs≦0.05, 30°<θ<36°  (1)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.05<Hs≦0.10, 29°<θ<36°  (2)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.10<Hs≦0.15, 28°<θ<36°  (3)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.15<Hs≦0.20, 27°<θ<36°  (4)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.20<Hs≦0.25, 26°<θ<36°  (5)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.25<Hs≦0.30, 25°<θ<35°  (6)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.30<Hs≦0.35, 23°<θ<34°  (7)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?in the case of 0.35<Hs≦0.40, 21°<θ<31°  (8)in-line-formulae description="In-line Formulae" end="tail"?

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