Supporting plate for a photomask in an apparatus for making a mi

Details Supporting plate for a photomask in an apparatus for making a mi Supporting plate for a photomask in an apparatus for making a mi

1998-12-17

1999-12-07

Pham, Hoa Q.

Optics: measuring and testing

Sample, specimen, or standard holder or support

G01N 2101

Patent

active

059992549

ABSTRACT:
An apparatus is used to make microchips in which monochromatic light issuing from a light source is guided to a photomask that is held in a predetermined position in which the monochromatic light rays are combined with a lens system and directed to a wafer. The supporting plate is a rectangular plate made from glass or glass-ceramic material that has a receptacle for holding the photomask. In order to provide a supporting plate according to the invention with weight that is as small as possible and with a dynamic stiffness as high as possible, the rectangular plate is provided with front-edge elongated blind holes extending in side edge regions along both long edges of the rectangular plate in the plane of the plate, as well as with other recesses. The elongated blind holes are preferably thin-walled and have a box-like shape.

REFERENCES:
patent: 5101420 (1992-03-01), Kushibiki et al.

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