Supporting device for heating crucible and deposition...

Details Supporting device for heating crucible and deposition... Supporting device for heating crucible and deposition...

2011-03-29

2011-03-29

Kacker, Ram N (Department: 1712)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S724000

Reexamination Certificate

active

07914620

ABSTRACT:
A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening portion corresponding to the hole and a shield portion extending along an inner wall of the hole.

REFERENCES:
patent: 1760413 (1930-05-01), Kiernan
patent: 3329524 (1967-07-01), Smith, Jr.
patent: 2002-097566 (2002-04-01), None
patent: 2002-0014703 (2003-09-01), None
patent: WO 03/079420 (2003-09-01), None
English translation of KR 2002-0014703, Lee, Sep. 2003.

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