Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1991-10-09
1993-04-20
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, G03B 2742
Patent
active
052047121
ABSTRACT:
A support device comprises a first and a second bearing unit for guiding the support device along a base surface and a straight guide extending parallel to the base surface, respectively. The support device has an object table which is coupled to a rigidification member and which is displaceable relative to the two bearing units in a z-direction transverse to the base surface and is tiltable about at least one axis of rotation directed parallel to the base surface by three force actuators. The rigidification member is coupled to the second bearing unit by a coupling member which is elastically deformable in the z-direction, and coupled to the first bearing unit via the force actuators, whereby a statically determined coupling of the rigidification member and the object table to the two bearing units is obtained. The support device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in an optical lithographic device. In particular, an accurate focusing of the object may be obtained by the use of the support device in an optical lithographic device.
REFERENCES:
patent: 4431304 (1984-02-01), Mayer
patent: 4473291 (1984-09-01), Mayer
patent: 4676649 (1987-06-01), Phillips
patent: 4698575 (1987-10-01), Bouwer
patent: 4708465 (1987-11-01), Isohata et al.
patent: 4737823 (1988-04-01), Bouwer et al.
patent: 4746800 (1988-05-01), Van Eijk et al.
patent: 5061956 (1991-10-01), Takubo et al.
patent: 5130747 (1992-07-01), Kikuiri et al.
Baggen Marcel C. M.
Bartray Petrus R.
Bouwer Adrianus G.
Janssen Henricus W. A.
Van Eijk Jan
A.S.M. Lithography B.V.
Slobod Jack D.
U.S. Philips Corp.
Wintercorn Richard A.
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