Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate
2006-10-10
2006-10-10
Dang, Phuc T. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
C257S771000, C438S778000
Reexamination Certificate
active
07119418
ABSTRACT:
Supercritical fluid-assisted deposition of materials on substrates, such as semiconductor substrates for integrated circuit device manufacture. The deposition is effected using a supercritical fluid-based composition containing the precursor(s) of the material to be deposited on the substrate surface. Such approach permits use of precursors that otherwise would be wholly unsuitable for deposition applications, as lacking requisite volatility and transport characteristics for vapor phase deposition processes.
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Baum Thomas H.
Korzenski Michael B.
Xu Chongying
Advanced Technology & Materials Inc.
Chappuis Margaret
Dang Phuc T.
Fuierer Tristan A.
Moore & Van Allen PLLC
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