Supercritical carbon dioxide-based cleaning of metal lines

Details Supercritical carbon dioxide-based cleaning of metal lines Supercritical carbon dioxide-based cleaning of metal lines

2006-09-05

2006-09-05

Webb, Gregory (Department: 1751)

Cleaning and liquid contact with solids

Processes

With treating fluid motion

C134S003000, C510S175000, C252S079400

Reexamination Certificate

active

07101443

ABSTRACT:
Supercritical carbon dioxide may be utilized to clean metal lines (e.g. copper, cobalt). The supercritical carbon dioxide cleans may include hydrogen gas in one embodiment, hydrofluoric acid in another embodiment, and hexafluoroacetyl acetone as a metal-binding ligand in another embodiment.

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Kondoh, E.;Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International; Oct. 29-31, 2003 pp. 42-43; Digital Object Identifier 10.1109/IMNC.2003.1268509.

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