Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Tunneling through region of reduced conductivity
Patent
1996-09-30
2000-02-01
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Thin active physical layer which is
Tunneling through region of reduced conductivity
257 38, 505193, 505237, H01L 2906, H01B 1200, B32B 1200
Patent
active
060205962
ABSTRACT:
A FET type superconducting device comprises a substrate having a principal surface, a thin superconducting channel formed of an oxide superconductor layer over the principal surface of the substrate, a superconducting source region and a superconducting drain region formed of an oxide superconductor layer over the principal surface of the substrate at the both ends of the superconducting channel which connects the superconducting source region and the superconducting drain region, so that superconducting current can flow through the superconducting channel between the superconducting source region and the superconducting drain region and a gate electrode on a gate insulator disposed on the superconducting channel for controlling the superconducting current flowing through the superconducting channel by a signal voltage applied to the gate electrode, wherein the superconducting device is isolated by a isolation layer directly formed on the principal surface of the substrate, the superconducting layer of the superconducting channel is directly formed on the principal surface of the substrate and the gate electrode is formed on the isolation layer excluding a portion on the gate insulator.
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Hatano et al., "Unique Method of Patterning Superconducting Thin Films by Selective Growth of YOBa-Cu-O", Japanese Journal of Applied Physics, vol. 29, No. 6, (1990), pp. 1076-1079.
Fujii et al., "Metal-Insulator-Superconductor Field-Effect-Transistor Using SrTIO.sub.3 /YBa.sub.2 Cu.sub.3 O.gamma. Heteroepitaxial Films", Japanese Journal of Applied Physics, vol. 31, No. 5B, May 1992, pp. L612-L615.
Saadat Mahshid
Sumitomo Electric Industries Ltd.
Wilson Allan R.
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