Super-junction trench MOSFET with resurf step oxide and the...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257SE21410, C257SE29256, C438S270000

Reexamination Certificate

active

08067800

ABSTRACT:
A super-junction trench MOSFET with Resurf Stepped Oxide is disclosed. The inventive structure can apply additional freedom for better optimization and manufacturing capability by tuning thick oxide thickness to minimize influence of charge imbalance, trapped charges, etc. . . . . Furthermore, the fabrication method can be implemented more reliably with lower cost.

REFERENCES:
patent: 6982459 (2006-01-01), Suzuki et al.
patent: 2006/0065923 (2006-03-01), Pfirsch
patent: 2008-227533 (2008-09-01), None

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