Sulfonium salt having polymerizable anion, polymer, resist...

Details Sulfonium salt having polymerizable anion, polymer, resist... Sulfonium salt having polymerizable anion, polymer, resist...

2007-10-25

2009-08-04

Lee, Sin J. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S907000, C430S910000, C430S921000, C430S923000, C430S925000, C430S325000, C430S326000, C430S330000, C430S942000, C526S243000, C526S245000, C526S287000, C562S108000, C562S109000, C562S110000, C562S111000, C562S113000

Reexamination Certificate

active

07569326

ABSTRACT:
A sulfonium salt having a polymerizable anion generates a strong sulfonic acid upon exposure to high-energy radiation so that it facilitates effective scission of acid labile groups in chemically amplified resist compositions. It is useful as a monomer from which a base resin for use in radiation-sensitive resist compositions is derived.

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