Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2008-05-13
2008-05-13
Chu, John S. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S905000, C430S910000, C430S922000, C549S013000, C549S029000, C549S088000, C549S090000, C568S027000, C568S028000
Reexamination Certificate
active
07371503
ABSTRACT:
A sulfonium salt compound excelling in transparency to deep ultraviolet rays at a wavelength of 220 nm or less, exhibiting well-balanced excellent performance such as sensitivity, resolution, pattern form, LER, and storage stability when used as a photoacid generator, a photoacid generator comprising the sulfonium salt compound, and a positive-tone radiation-sensitive resin composition containing the photoacid generator.The sulfonium salt compound is shown by the following formula (I),wherein R1represents a halogen atom, an alkyl group, a monovalent alicyclic hydrocarbon group, an alkoxyl group, or —OR3group, wherein R3is a monovalent alicyclic hydrocarbon group, R2represents a (substituted)-alkyl group or two or more R2groups form a cyclic structure, p is 0-7, q is 0-6, n is 0-3, and X−indicates a sulfonic acid anion.The positive-tone radiation-sensitive resin composition comprises (A) a photoacid generator of the sulfonium-salt compound and (B) an acid-dissociable group-containing resin.
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Ebata Satoshi
Miyamatsu Takashi
Niwata Hirokazu
Wang Yong
Chu John S.
JSR Corporation
Merchant & Gould P.C.
Raimund Christopher W.
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