Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-06-25
2009-08-04
Walke, Amanda C. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S311000, C430S330000, C430S913000, C430S914000, C562S030000
Reexamination Certificate
active
07569324
ABSTRACT:
Sulfonate salts have the formula: R1COOCH2CH2CF2CF2SO3−M+wherein R1is alkyl, aryl or hetero-aryl, M+is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oxime sulfonates and sulfonyloxyimides derived from these salts are effective photoacid generators in chemically amplified resist compositions.
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Kinsho Takeshi
Kobayashi Katsuhiro
Ohsawa Youichi
Watanabe Takeru
Shin-Etsu Chemical Co. , Ltd.
Walke Amanda C.
Westerman, Hattori, Daniels & Adrian , LLP.
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