Substrates processing device

Details Substrates processing device Substrates processing device

1993-04-23

1995-04-11

Jones, W. Gary

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118 52, 118693, 118694, 118712, 222 64, B05C 500

Patent

active

054054435

ABSTRACT:
A substrates processing device having a tank in which process solution is contained, a bottle communicated with the tank through a conduit and located above an object to be processed with the process solution supplied, a nozzle located under the bottle, a support for supporting the object to be processed, and a changeover device for making pressure in it negative through a conduit when the process solution is to be added to it and also making pressure in it normal through the conduit when the process solution is to be supplied to the nozzle.

REFERENCES:
patent: 2817600 (1957-12-01), Yahnke
patent: 3605682 (1971-09-01), Groce et al.
patent: 4840138 (1989-06-01), Stirbis
patent: 5090594 (1992-02-01), Randall, Jr. et al.
patent: 5127362 (1992-07-01), Iwatsu et al.

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