Substrates coated with an antihalation layer that contains a res

Details Substrates coated with an antihalation layer that contains a res Substrates coated with an antihalation layer that contains a res

1997-11-26

1998-12-22

Codd, Bernard

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430156, 430512, 522113, 522126, 522130, 522132, 522133, G03C 183

Patent

active

058517308

ABSTRACT:
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.

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