Substrate treating apparatus

Liquid purification or separation – Structural installation – Closed circulating system

Reexamination Certificate

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Details

C210S167310, C210S167320, C210S181000, C210S416100, C210S748080, C134S110000, C134S111000, C134S902000

Reexamination Certificate

active

07422681

ABSTRACT:
A substrate treating apparatus for treating substrates having a film coating. The apparatus includes a treating unit for treating the substrates with a treating solution, a drain pipe for draining the treating solution from the treating unit, a filter mounted on the drain pipe, and an ultraviolet emitting unit for the filter for emitting ultraviolet light to the treating solution flowing through the filter.

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