Liquid purification or separation – Structural installation – Closed circulating system
Reexamination Certificate
2005-05-04
2008-09-09
Prince, Fred (Department: 1797)
Liquid purification or separation
Structural installation
Closed circulating system
C210S167310, C210S167320, C210S181000, C210S416100, C210S748080, C134S110000, C134S111000, C134S902000
Reexamination Certificate
active
07422681
ABSTRACT:
A substrate treating apparatus for treating substrates having a film coating. The apparatus includes a treating unit for treating the substrates with a treating solution, a drain pipe for draining the treating solution from the treating unit, a filter mounted on the drain pipe, and an ultraviolet emitting unit for the filter for emitting ultraviolet light to the treating solution flowing through the filter.
REFERENCES:
patent: 3276458 (1966-10-01), Davis et al.
patent: 3971338 (1976-07-01), Alexson
patent: 4857204 (1989-08-01), Joklik
patent: 5368171 (1994-11-01), Jackson
patent: 5549798 (1996-08-01), Kitajima et al.
patent: 5722442 (1998-03-01), Hoffman et al.
patent: 5843309 (1998-12-01), Mancil
patent: 6039057 (2000-03-01), Doran
patent: 6116254 (2000-09-01), Shiramizu
patent: 6253584 (2001-07-01), Shin
patent: 6267122 (2001-07-01), Guldi et al.
patent: 6273108 (2001-08-01), Bergman et al.
patent: 6328884 (2001-12-01), Kunkel
patent: 6869487 (2005-03-01), Bergman
patent: 2002/0020436 (2002-02-01), Bergman
patent: 2003/0010694 (2003-01-01), Holt
patent: 5-237499 (1993-09-01), None
patent: 5-304126 (1993-11-01), None
patent: 6-275593 (1994-09-01), None
patent: 8-274057 (1996-10-01), None
patent: 2000-223469 (2000-08-01), None
patent: 2001-358134 (2001-12-01), None
Abiko Yoshitaka
Hiroe Toshio
Maegawa Tadashi
Morita Akira
Dainippon Screen Mfg. Co,. Ltd.
Ostrolenk Faber Gerb & Soffen, LLP
Prince Fred
LandOfFree
Substrate treating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate treating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate treating apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3981279