4. Coating apparatus
  5. Immersion or work-confined pool type
  6. With means for moving work through, into or out of pool

Tadashi Maegawa

Inventor

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Apparatus for dipping substrates in processing fluid

Coating apparatus – Immersion or work-confined pool type – With means for moving work through – into or out of pool
Patent

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Substrate treating apparatus

Liquid purification or separation – Structural installation – Closed circulating system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-303208

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