Cleaning and liquid contact with solids – Apparatus – With work feeding and/or discharging means
Patent
1998-01-15
2000-01-04
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With work feeding and/or discharging means
134134, 134902, B08B 304
Patent
active
060098902
ABSTRACT:
A substrate transporting and processing system generally comprises: a supply section of a carrier 1 for housing therein wafers W to be processed, in a horizontal state; a discharge section of the carrier 1; a wafer unloading arm 14 for unloading the wafers W from said carrier 1; a wafer loading arm 16 for loading the wafers W into the carrier 1; an attitude changing unit 40 for changing the attitude of the wafers W between a horizontal state and a vertical state; a processing section 3 for suitably processing the wafers W; and a wafer transport arm 56 for delivering the wafers W between the attitude changing unit 40 and the processing section 3 and for transporting the wafers W into and from the processing section. Thus, after the wafers W housed in the carrier 1 in the horizontal state are unloaded and the attitude of the wafers W is changed into the vertical state, suitable processes are carried out, and the attitude of the wafers W is changed in the horizontal state after processing, so that the wafers W can be housed in the carrier 1. Thus, it is possible to decrease the size of the whole system to improve the throughput and to improve the yield of products.
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EPO 526,245 134/190, Feb. 1993.
Kamikawa Yuji
Kaneko Satoshi
Kitahara Shigenori
Koguchi Akira
Kuroda Osamu
Stinson Frankie L.
Tokyo Electron Limited
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