4. Cleaning and liquid contact with solids
  5. Apparatus
  6. With work feeding and/or discharging means

Akira Koguchi

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Container handling system for substrate processing apparatus...

Material or article handling – Device for emptying portable receptacle
Reexamination Certificate

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Method and device for arraying substrates and processing...

Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate

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Method of drying substrates and drying apparatus

Drying and gas or vapor contact with solids – Process – By centrifugal force
Reexamination Certificate

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Substrate transporting and processing system

Cleaning and liquid contact with solids – Apparatus – With work feeding and/or discharging means
Patent

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Profile ID: LFUS-PAI-P-1209483

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