Substrate transport apparatus

Details Substrate transport apparatus Substrate transport apparatus

1997-10-27

1998-12-01

Bucci, David A.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

414416, 414752, 414936, 414938, 414811, 414816, B65G 106, B65G 4724

Patent

active

058428240

ABSTRACT:
A wafer cassette for storing a wafer is provided vertically above (direction Z) a transport path for a wafer which is carried by a robot arm driven by a drive mechanism to move along a transport guide extending from a wafer inlet from a wafer outlet. The wafer cassette is disposed at a position between the inlet and a pre-alignment mechanism. The wafer cassette is supported by a cassette retaining base. Drive members driven by a wafer up-down mechanism are fixed to both ends of the cassette retaining base which face opposite each other in a direction perpendicular to the transport path. Thus, the wafer cassette is vertically moved by the wafer up-down mechanism to deliver a wafer between the robot arm and the wafer cassette.

REFERENCES:
patent: 4586743 (1986-05-01), Edwards et al.
patent: 4699556 (1987-10-01), Foulke
patent: 4778331 (1988-10-01), Kimata et al.
patent: 4778332 (1988-10-01), Byers et al.
patent: 4846626 (1989-07-01), Engelbrecht
patent: 5504345 (1996-04-01), Bartunek et al.

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