Substrate transferring apparatus

Details Substrate transferring apparatus Substrate transferring apparatus

1998-06-23

2000-10-17

Kramer, Dean J.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414222, 414937, B65B 2102

Patent

active

061321605

ABSTRACT:
A substrate transferring apparatus 8 for taking out a semiconductor substrate W to be processed housed in a container 6 from within the container 6 comprises support plates 9 and a positional error correcting member 23 on each support plate. Each support plate 9 has a base portion and is to be inserted into the container 6 to take out the substrate W. The positional error correcting member 23 is provided at the base portion of the support plate 9. The member 23 is to abut a part of the substrate W projecting out of the container 6 and to push back the substrate W into the container 6 when the support plate 9 is inserted into the container 6.

REFERENCES:
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5655871 (1997-08-01), Ishii et al.
patent: 5700127 (1997-12-01), Harada et al.
patent: 5826129 (1998-10-01), Hasebe et al.

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