Substrate transfer system for semiconductor processing equipment

Details Substrate transfer system for semiconductor processing equipment Substrate transfer system for semiconductor processing equipment

1997-11-21

2000-05-30

Olszewski, Robert P.

Material or article handling

Elevator or hoist and loading or unloading means therefor

With external cooperating movable feeding or discharging means

414180, 414785, 414804, 414941, 294 32, 294902, B65G 4907, H01L 2168

Patent

active

060684410

ABSTRACT:
A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.

REFERENCES:
patent: 3708851 (1973-01-01), Vladik
patent: 4281031 (1981-07-01), Hillman et al.
patent: 4433951 (1984-02-01), Koch et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5022695 (1991-06-01), Ayers
patent: 5046909 (1991-09-01), Murdoch
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5096291 (1992-03-01), Scott
patent: 5104694 (1992-04-01), Saito et al.
patent: 5445491 (1995-08-01), Nakagawa et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5643366 (1997-07-01), Somekh et al.
patent: 5692873 (1997-12-01), Weeks et al.
patent: 5700046 (1997-12-01), Van Doren et al.
patent: 5746460 (1998-05-01), Marohl et al.
patent: 5765889 (1998-06-01), Nam et al.
patent: 5810935 (1998-09-01), Lee et al.

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