Substrate transfer device, substrate processing apparatus...

Details Substrate transfer device, substrate processing apparatus... Substrate transfer device, substrate processing apparatus...

2007-09-05

2011-11-15

Rodriguez, Saul (Department: 3652)

Material or article handling

Elevator or hoist and loading or unloading means therefor

With external cooperating movable feeding or discharging means

C414S222010

Reexamination Certificate

active

08057153

ABSTRACT:
To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A substrate transfer device comprises a plurality of support pins disposed at positions set apart from one another around a support shaft of a stage, which support a substrate, e.g., a wafer W, on the bottom surface thereof, a base at which the support pins are mounted, a vertical drive means (Z-direction drive means) for raising/lowering the substrate by driving the support pins up/down via the base and a horizontal drive means (X-direction drive means, Y-direction drive means) for adjusting the position of the substrate along the horizontal direction (X and Y directions) by horizontally driving the support pins via the base.

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