Substrate transfer device

Details Substrate transfer device Substrate transfer device

1990-07-23

1991-07-09

Spar, Robert J.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

414331, 414416, 414156, 414222, 901 8, B65G 4900

Patent

active

050300563

ABSTRACT:
A substrate transfer device containing an arm support member for supporting plural substrate support arms at one ends thereof, said arms having substrate housing areas at the other ends thereof, a structure arranged on a base to freely move in the longitudinal direction of the substrate support arms while holding the arm support member, another arm support member for holding a substrate support arm at the other side of the first arm support member, a structure arranged on the base to freely move in the longitudinal direction of the one substrate support arm while holding the arm support member for one substrate, a structure for moving the base up and down, and a structure for moving the base in a direction perpendicular to the substrate support arms on a plane parallel to the plane in which the substrate support arms are included.

REFERENCES:
patent: 4319864 (1982-03-01), Kaufeldt
patent: 4728252 (1988-03-01), Lada et al.
patent: 4744715 (1988-05-01), Kawabata
patent: 4775281 (1988-10-01), Prentakis

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