Substrate transfer apparatus and method, and storage medium

Details Substrate transfer apparatus and method, and storage medium Substrate transfer apparatus and method, and storage medium

2005-09-16

2008-12-02

Keenan, James (Department: 3652)

Supports: racks

Special article

Platelike

C206S711000, C414S416080, C414S937000

Reexamination Certificate

active

07458469

ABSTRACT:
In a substrate transfer apparatus, an adaptor unit25includes a box-shaped main body40having three open sides; and a plurality of stage arms41disposed in the main body40, serving as substrate mounting members. Each of the stage arms41has a disc-shaped wafer supporting portion411disposed at an approximately central portion of the main body40and a flat body412disposed in the main body40so as not to interfere with the moving paths of transfer arms241and341. Formed at a connecting portion of the wafer supporting portion411and the body412are cutout portions413for preventing interference between the stage arms41and two prongs of leading end portions of the transfer arms241and341introduced into the main body40.

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