Substrate transfer apparatus

Details Substrate transfer apparatus Substrate transfer apparatus

1997-04-22

1998-01-27

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

4147443, 414937, 414941, 294 641, B25J 1506

Patent

active

057116466

ABSTRACT:
A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations comprises an apparatus body, a transfer member, movably provided on the apparatus body, for supporting and transferring the substrate, the transfer member having a plurality of support portions for supporting the substrate at different positions in the same plane, moving mechanism for moving the transfer member for enabling the transfer member to receive and deliver the substrate, and switching mechanism for switching the position of the transfer member among a plurality of positions for receiving and delivering the substrate on the support portions.

REFERENCES:
patent: 4775281 (1988-10-01), Prentakis
patent: 5007784 (1991-04-01), Genov et al.
patent: 5123804 (1992-06-01), Ishii et al.

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