Substrate temperature regulating support pins

Details Substrate temperature regulating support pins Substrate temperature regulating support pins

2005-08-18

2008-12-09

Jiang, Chen-Wen (Department: 3744)

Automatic temperature and humidity regulation

Miscellaneous

Burner controls with automatic cutoff

C062S259200, C118S724000, C118S725000

Reexamination Certificate

active

07461794

ABSTRACT:
A method and apparatus for regulating the temperature of substrates positioned within a chamber are provided. In one embodiment, a substrate support pin is provided that includes a body having a substrate support region defined at a first end and a mounting region defined at a second end of the body. A mounting feature is formed at the mounting region and is adapted to couple the body to a vacuum chamber body. A passage extends from the mounting region to the support region. An outlet formed through the body and orientated at an angle greater than zero relative to a centerline of the body is p provided to deliver fluids flowing through the passage out the first end of the body. In another embodiment, a chamber includes a pin configured to provide a temperature controlled fluid to an underside of a substrate supported on the pin.

REFERENCES:
patent: 5751003 (1998-05-01), Rose et al.
patent: 6143086 (2000-11-01), Tepman
patent: 2004/0073328 (2004-04-01), De Haas et al.
patent: 2005/0095088 (2005-05-01), Kurita et al.
patent: 2000088701 (2000-03-01), None

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