Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-03-13
2007-03-13
King, Roy (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S275100, C204S297010, C204S297140
Reexamination Certificate
active
10143212
ABSTRACT:
An apparatus and method for supporting a substrate is provided. In one embodiment, an apparatus for supporting a substrate includes a body having a band extending therefrom. The band is adapted to retain a fluid on the body thereby forming a shallow processing bath for processing the substrate. The band is adapted to deflect under centrifugal force to release the fluid from the substrate as the body is rotated above a predetermined rate.
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Applied Materials Inc.
King Roy
Leader William T.
Patterson & Sheridan LLP
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