Substrate support bushing

Details Substrate support bushing Substrate support bushing

2004-02-12

2011-10-11

Zervigon, Rudy (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345430, C156S345440, C156S345450, C384S032000, C384S050000, C384S051000, C384S470000, C384S509000, C384S523000, C384S525000

Reexamination Certificate

active

08033245

ABSTRACT:
An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.

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