Substrate support assembly with thermal isolating plate

Details Substrate support assembly with thermal isolating plate Substrate support assembly with thermal isolating plate

2006-09-29

2008-12-30

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S491100, C250S492200, C250S492300, C118S725000, C118S728000, C118S729000, C156S345510, C134S001000, C134S001300, C134S032000

Reexamination Certificate

active

07470919

ABSTRACT:
Embodiments of the invention generally provide a substrate support assembly. In one embodiment, a substrate support assembly includes a substrate support plate, a thermal regulating plate coupled in a spaced-apart relation to the substrate support plate and a main actuator coupled in a spaced-apart relation to the thermal regulating plate. The main actuator is adapted to move the substrate support plate laterally. The substrate support assembly is configured to limit the thermal influence of the main actuator on a substrate positioned on the substrate support plate.

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