Substrate support assembly

Details Substrate support assembly Substrate support assembly

2006-05-16

2006-05-16

Edwards, Laura (Department: 1734)

Coating apparatus

Work holders, or handling devices

C118S725000, C118S728000, C134S001100

Reexamination Certificate

active

07045014

ABSTRACT:
A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.

REFERENCES:
patent: 5000113 (1991-03-01), Wang et al.
patent: 5439627 (1995-08-01), De Jager
patent: 5522937 (1996-06-01), Chew et al.
patent: 5633073 (1997-05-01), Cheung et al.
patent: 5792272 (1998-08-01), van Os et al.
patent: 5983906 (1999-11-01), Zhao et al.
patent: 6066836 (2000-05-01), Chen et al.
patent: 6455781 (2002-09-01), Tong
patent: 2001/0045262 (2001-11-01), Gujer et al.

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