Substrate support

Details Substrate support Substrate support

2004-11-16

2010-06-15

Lowe, Michael S (Department: 3652)

Metal fusion bonding

With means to handle work or product

Including means to orient work or position work portion...

C269S013000, C269S129000, C269S305000, C269S317000, C269S319000, C414S781000, C414S783000, C414S805000, C414S936000, C414S941000

Reexamination Certificate

active

07735710

ABSTRACT:
A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate thereto. A first pushing member is radially coupled to the first body and adapted to urge the substrate in a first direction parallel to the support plate when the first body rotates. In another aspect, a load lock chamber having a substrate support that supports a substrate placed thereon includes a cooling plate that is moved to actuate at least one alignment mechanism. The alignment mechanism includes a pushing member that urges the substrate in a first direction towards a center of the support. The pushing member may additionally rotate about an axis perpendicular to the first direction.

REFERENCES:
patent: 4064659 (1977-12-01), Ulivi
patent: 4347927 (1982-09-01), Landes
patent: 4621797 (1986-11-01), Ziegenfuss
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4764076 (1988-08-01), Layman et al.
patent: 4784377 (1988-11-01), Woodward
patent: 4788994 (1988-12-01), Shinbara
patent: 4898639 (1990-02-01), Moe et al.
patent: 5028202 (1991-07-01), Katada et al.
patent: 5031547 (1991-07-01), Hirose
patent: 5123174 (1992-06-01), Noguchi
patent: 5173029 (1992-12-01), Delventhal et al.
patent: 5192087 (1993-03-01), Kawashima et al.
patent: 5322079 (1994-06-01), Fukutomi et al.
patent: 5374147 (1994-12-01), Hiroki et al.
patent: 5376216 (1994-12-01), Yoshioka et al.
patent: 5378215 (1995-01-01), Harkins
patent: 5505438 (1996-04-01), Baldwin et al.
patent: 5509771 (1996-04-01), Hiroki
patent: 5538231 (1996-07-01), Baldwin et al.
patent: 5566466 (1996-10-01), Hearne
patent: 5579718 (1996-12-01), Freerks
patent: 5630269 (1997-05-01), Wasserbaech et al.
patent: 5636960 (1997-06-01), Hiroki et al.
patent: 5636980 (1997-06-01), Young et al.
patent: 5775000 (1998-07-01), Maekawa et al.
patent: 5851041 (1998-12-01), Anderson et al.
patent: 5853214 (1998-12-01), Babbs et al.
patent: 5897108 (1999-04-01), Gordon et al.
patent: 5954072 (1999-09-01), Matusita
patent: 5961107 (1999-10-01), Morghen
patent: 5974681 (1999-11-01), Gonzalez-Martin et al.
patent: 5989342 (1999-11-01), Ikeda et al.
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6163015 (2000-12-01), Moore et al.
patent: 6167893 (2001-01-01), Taatjes et al.
patent: 6190997 (2001-02-01), Becker et al.
patent: 6262582 (2001-07-01), Barringer et al.
patent: 6273484 (2001-08-01), Peng
patent: 6328296 (2001-12-01), Tyveleijn
patent: 6485248 (2002-11-01), Taylor, Jr.
patent: 6544338 (2003-04-01), Batchelder et al.
patent: 6612014 (2003-09-01), Donoso et al.
patent: 6811618 (2004-11-01), Kuroda
patent: 6824343 (2004-11-01), Kurita et al.
patent: 7101253 (2006-09-01), Olgado
patent: 7104535 (2006-09-01), Kurita et al.
patent: 7151981 (2006-12-01), Kurita et al.
patent: 2002/0051697 (2002-05-01), Ko et al.
patent: 2002/0064450 (2002-05-01), Coomer et al.
patent: 2004/0037676 (2004-02-01), Harris et al.
patent: 2004/0082192 (2004-04-01), Kopacz et al.
patent: 2004/0245956 (2004-12-01), Kurita et al.
patent: 0290218 (1988-11-01), None
patent: 61-214445 (1986-09-01), None
patent: 63-124543 (1988-05-01), None
patent: 09-290890 (1997-11-01), None
patent: 2000-306980 (2000-11-01), None
patent: WO 02/05331 (2002-01-01), None
English Translation of Japanese Office Action dated May 20, 2008.
The First Office Action for Chinese Application No. 03804395.5 dated Jan. 12, 2007.
The Second Office Action for Chinese Application No. 03804395.5 dated Jul. 20, 2007.
The Third Office Action for Chinese Application No. 03804395.5 dated Nov. 16, 2007.
The Notice to File a Response for Korean Application No. 10-2004-7013047 dated Dec. 27, 2006.
PCT Written Opinion for International Application No. PCT/US03/04885 dated Feb. 5, 2004.
PCT Notification of Transmittal of Inetnerational Preliminary Examination Report for International Application No. PCT/US03/04885 dated Jul. 9, 2004.
PCT Search Report for International Application No. PCT/US03/04885 dated Jul. 30, 2003.

Affiliated with

Also associated with

Rating

Substrate support does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate support, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate support will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4234361