Substrate retainer wear detection method and apparatus

Details Substrate retainer wear detection method and apparatus Substrate retainer wear detection method and apparatus

2005-09-06

2005-09-06

Morgan, Eileen P (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S008000, C451S021000, C451S041000, C451S285000, C451S398000

Reexamination Certificate

active

06939202

ABSTRACT:
An apparatus and method are provided for detecting wear in substrate retainers used for chemical mechanical planarization processes. A substrate retainer is provided that is adapted to enable a sensor to detect when the wear edge of the retainer has worn to a critical wear threshold so that the retainer may be replaced prior to failure.

REFERENCES:
patent: 6390908 (2002-05-01), Chen et al.
patent: 6702646 (2004-03-01), Gitis et al.

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