Substrate proximity drying using in-situ local heating of...

Details Substrate proximity drying using in-situ local heating of... Substrate proximity drying using in-situ local heating of...

2005-09-30

2010-10-05

Perrin, Joseph L (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S095200, C134S105000, C134S902000

Reexamination Certificate

active

07806126

ABSTRACT:
A substrate support for holding a substrate during fluid preparation is provided. The substrate support includes a support member defined from a resistive material. The support member is coupled to a first electrode and a second electrode to enable current heating of the resistive material of the support member. The support member is configured to support the substrate at a point. The current heating assists in evaporating fluid at the point during fluid preparation of the substrate.

REFERENCES:
patent: 5986874 (1999-11-01), Ross et al.
patent: 2005/0139318 (2005-06-01), Woods et al.
patent: 2006/0254716 (2006-11-01), Mosden et al.

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